Reticle Handler Robot (ASML) software

The Reticle Handler is a sub-module of the Twinscan XT of ASML. The robot takes a central position within the reticle handler. The robot moves the reticles between the modules of the reticle handler with high accuracy. 

Interesting part of the software development of the robot is the fully automatic calibration. Since the robot is equipped with a 6 DOF (Degrees Of Freedom) Torque/Force sensor, it is possible to 'feel' it's surroundings. During calibration the robot feels and learns the exact positions and orientations of the modules it interfaces with during operation. Once the calibration is finished, the robot exchanges reticles with those modules with high speed and high accuracy.

The picture below shows the reticle handler in a test setup, the second picture shows the total Twinscan XT in which the Reticle handler (robot) is integrated.