Robot grippers (ASML - Carl Zeiss)

At Carl Zeiss (Oberkochen, Germany), lenses are produced for ASML lithography machines. During the production process, these lenses go through multiple cycles. The lenses, which can cost up to around 1 million euros, are moved using a Fanuc robot. It goes without saying that product safety is a high priority at all stages of the process. In the development of the RP robot gripper and the OH robot gripper, EBtech, as a system designer, was responsible for the electrical design, software development, and motion control.

The complete RP gripper system includes the following electrical components, among others:
- PLC,
- 3 servo motors,
- QR camera,
- 3 x 3-axis force sensors,
- Inclinometer,
- 48 digital sensors,
- 16 analog sensors.

 
RP-robot gripper assembly

Fanuc robot used for handling lenses